To standardize the production and quality control of domestic semiconductor-grade PFA tubing and enhance the independent and controllable capabilities of the industrial chain, the Group Standard for "Semiconductor-Grade Fusible Polytetrafluoroethylene (PFA) Tubing" (hereinafter referred to as the "Standard") has been officially released. Organized by the China National Petroleum and Chemical Industry Federation, led by Baoshili in drafting, and jointly participated by more than 20 enterprises, the Standard took nearly two years of compilation and discussion. It will be formally implemented on December 11, 2025.
With its comprehensive, professional, and refined specific indicators, the Standard sets strict norms for the "golden blood vessels" of China's semiconductor industry. This issue will provide a key interpretation for you.
In the semiconductor manufacturing process, semiconductor-grade PFA tubing is responsible for transporting various electronic chemicals and ultrapure water. Its cleanliness and reliability are directly related to the yield rate of the final products. However, due to the lack of a unified domestic standard, product quality varies greatly, becoming a potential risk point in production.
The Standard systematically specifies key purity indicators such as the dimensional specifications and metal ion elution amount of semiconductor-grade PFA tubing, as well as measurement and inspection methods. It provides clear bases for production, testing, and procurement, effectively filling the gap in domestic standards for semiconductor-grade PFA tubing.
The Standard sets relevant benchmarks for both the technical indicators and dimensional specifications of semiconductor-grade PFA tubing. For example, clear numerical indicators are specified for technical indicators such as appearance, total organic carbon (TOC), and surface roughness, as well as dimensional specifications.
As the core purity indicator of semiconductor-grade PFA tubing, the Standard imposes stricter requirements. While referencing the international standard SEMI F57, it also combines the actual situation of the domestic industry and raises the purity standards in terms of multiple technical indicators, demonstrating significant advancement. For instance, it requires that the content of more than ten types of key metal impurities such as aluminum, iron, and sodium is ≤ 1 μg/m², which is more stringent than the SEMI F57 standard.
To address the issue of incomparable data caused by inconsistent measurement methods in the past, this Standard sets strict and detailed regulations on clean environments, soaking conditions, and sample handling, ensuring the consistency and impartiality of test results.
In addition, the Standard also cites the requirements of detailed rules such as GB/T 191 (Packaging - Pictorial Markings for Handling of Goods), GB/T 601 (Standard Titration Solutions for Volumetric Analysis), GB/T 2828 (Sampling Procedures and Tables for Inspection by Attributes), GB/T 2918 (Plastics - Standard Atmosphere for Conditioning and Testing), GB/T 8170 (Rules for Rounding Off of Numerical Values), GB/T 8804.1 (Plastics - Determination of Tensile Properties - Part 1: General Principles), and GB/T 8806-2008 (Plastics - Determination of Dimensions of Tubing), providing a reliable basis for itself.
Before the release of the Standard, upstream and downstream enterprises in the semiconductor industrial chain often faced the dilemma of "multiple specifications and standards" in the production and testing of PFA tubing. This not only increased procurement adaptation costs but also hid yield rate risks due to inconsistent quality judgment bases.
This Standard upgrades the previously scattered corporate specifications into public and consistent industrial consensus. From tubing manufacturers, chip fabrication plants to testing institutions, all now have a criterion for evaluation. This greatly improves the collaboration efficiency and quality reliability of the supply chain.
As the leading drafting unit, Baoshili will take practical actions to promote the wide application of the Standard, accelerate the construction of a high-standard, high-requirement, and high-quality production ecosystem for semiconductor-grade PFA tubing, and contribute to the localization replacement.
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