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Application of Baoshili ultra-pure fluorine material (PFA) products in high-temperature single-chip SPM equipment

2025-05-21

Recently, a leading domestic cleaning equipment company announced that its high-temperature single-chip SPM equipment has successfully passed product verification, which is another important technological progress in its wet cleaning equipment. With the continuous improvement of the performance of its ultra-pure fluorine material (PFA) products, Baoshili has been able to meet the stringent requirements of high-temperature single-chip SPM cleaning equipment for pipeline systems.



According to SEMI data, the global semiconductor cleaning equipment market will reach US$5 billion in 2023, and single-wafer cleaning equipment will account for more than 70% of the overall cleaning equipment market, maintaining an extremely high share. With the continuous advancement of semiconductor technology, the chip size continues to shrink and the sensitivity to impurities has increased significantly, and the importance of high-temperature single-wafer SPM equipment has also risen, becoming more and more popular in the industry.


In the semiconductor manufacturing process, the wet process requires the wafer to be processed at a high temperature of nearly 200°C using a variety of chemicals such as hydrofluoric acid, hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, ammonia water, and aqueous hydrogen peroxide. The application scenarios of single-wafer high-temperature SPM equipment are also very wide.




Currently, Baoshili's ultra-pure fluorine material (PFA) products can be configured in the pipeline system of high-temperature single-chip SPM wet cleaning equipment.


PFA, commonly known as fusible PTFE, is a copolymer of tetrafluoroethylene and a small amount of perfluoroalkyl vinyl ether. Compared with PTFE, it has stronger melt adhesion, lower melt viscosity, can withstand high temperatures of 260°C, has excellent chemical corrosion resistance, low friction coefficient, good electrical properties, and its electrical insulation is not affected by temperature.



Baoshili ultra-pure fluorine material products have the following advantages:


During the high-temperature cleaning process, PFA pipe fittings can withstand the corrosion of high-temperature cleaning fluids, ensuring stable operation of the equipment.


During the chemical cleaning process, the excellent corrosion resistance and low metal ion precipitation of PFA pipe fittings can ensure the ultra-purity of chemicals.


As the hub in the pipeline, PFA joints, with their special mechanical properties and sealing structure, can be combined with PFA fittings to build a complete ultra-pure chemical delivery system.


As one of the few domestic companies that master semiconductor-grade PFA manufacturing technology, Baoshili's core competitiveness lies in independent technological innovation. The company uses high-purity raw materials from Daikin and combines independent processes to achieve large-scale production of Ultra-Clean PFA Tube. The products have not only passed international certifications such as ISO 9001 and meet SEMI standards, but also have more than 10 independent intellectual property rights. It is one of the representative companies for domestically replacing ultra-clean parts.


In order to maintain the uniformity of industry standards, Baoshili also has the courage to assume social responsibilities and take the lead in drafting the "Semiconductor-grade ultra-pure meltable polytetrafluoroethylene (PFA) tube" group standard to lead the development of the industry and accelerate the process of domestic substitution; with Baoshili's dedicated research and development, the ultra-pure fluorine material products, such as ultra-clean PFA pipe fittings and ultra-clean PFA connectors, have passed the product verification of many leading semiconductor companies and maintained a stable supply.


As semiconductor manufacturing moves towards higher precision and more demanding processes, Bioshine's ultra-pure PFA materials can provide reliable ultra-pure fluorine material product solutions for high-temperature single-chip SPM equipment through material innovation and engineering applications. In the future, as the precision of the process continues to increase, Bioshine will continue to increase its investment in technology research and development, continue to provide high-quality ultra-pure fluorine material products, and promote the accelerated development of domestic semiconductors.



 
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