01. What is PFA material?
PFA, commonly known as fusible PTFE, is a copolymer of tetrafluoroethylene and a small amount of perfluoroalkyl vinyl ether. It can be injection molded, extruded, and blow molded to solve the problem of difficult processing of PTFE. It is mainly used in semiconductor equipment components, high-purity chemical storage tanks, medical-grade pipelines and other fields.
02. What is semiconductor-grade PFA?
According to product purity, performance and application fields, domestic PFA can be mainly divided into four categories: ordinary grade, coating grade, ultra-pure grade, and semiconductor grade. Among them, the semiconductor grade has strict requirements on purity, which makes research and development and production difficult.
03. Excellent properties of semiconductor-grade PFA
In semiconductor cleaning, etching, deposition and other process treatments, a large amount of wet electronic chemicals such as hydrofluoric acid, hydrochloric acid, nitric acid, sulfuric acid, ammonium phosphate, and hydrogen peroxide aqueous solution are required. Therefore, semiconductor-grade PFA products with superior corrosion resistance, high temperature resistance, and ultra-purity have become the first choice for advanced processes.
Semiconductor-grade PFA has the following superior properties:
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Super corrosion resistance
Semiconductor-grade PFA has excellent corrosion resistance when facing various strong acids, strong alkalis and organic solvents, which can effectively prevent chemical substances from damaging the equipment and ensure the normal operation of semiconductor equipment.
Semiconductor-grade PFA materials have extremely strong chemical inertness. The metal ion precipitation of products such as pipes, joints and valves made of this material is extremely low, which can ensure the high purity of semiconductor wet electronic chemicals during transportation.
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Excellent insulating material
As an excellent insulating material, semiconductor-grade PFA has a stable dielectric constant and high surface resistivity over a wide temperature range. In addition, the electrical insulation of PFA is not affected by temperature, which enables it to maintain excellent electrical properties in high temperature environments.
04. Application scope of semiconductor-grade PFA
PFA pipes, PFA joints, PFA valves and other products made of semiconductor-grade PFA materials are widely used in the field of semiconductor manufacturing.
Semiconductor manufacturing needs to be carried out in a clean environment. Semiconductor-grade PFA products, such as PFA pipe fittings, can be used in various pipeline systems in cleanrooms, such as gas transportation, liquid transportation and discharge. Its high cleanliness and strong corrosion resistance can ensure the stability and safety of the cleanroom.
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Wafer processing equipment
Wafer is the core material of semiconductor manufacturing and needs to go through multiple processing steps, including cleaning, deposition, etching and packaging. Semiconductor-grade PFA products can be used in transmission pipelines in wafer processing equipment to improve equipment performance and production efficiency.
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Chemical Mechanical Polishing (CMP)
CMP is a commonly used surface treatment technology in semiconductor manufacturing, which is used to remove tiny particles and roughness on the surface of wafers. Semiconductor-grade PFA products can be used as feed pipes and circulation pipes in CMP equipment to ensure the normal operation of the equipment.
In the semiconductor manufacturing process, various gases are widely used in chemical reactions and processing. Semiconductor-grade PFA products can also be used in gas delivery systems, such as vacuum pipes, airflow control pipes and exhaust gas discharge pipes, to ensure the stability and safety of gas delivery systems.
05. Current status of semiconductor-grade PFA development
With the development of high integration, high density and refinement of large-scale integrated circuits, higher purity and functionality requirements are put forward for the materials used in the semiconductor production process. At present, most semiconductor manufacturers still rely on imported PFA products, but Baoshili has created a variety of semiconductor-grade PFA material products, such as ultra-clean PFA pipe fittings and ultra-clean PFA joints, through continuous R&D technology investment, to meet the rapid development needs of the industry.
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